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美国 SEMI S2
半导体工业的全球标准
SEMI 是什么?
SEMI( 半导体设备与材料的国际性组织 ) 是半导体工业的全球执行联盟,成立于 1970 年,总部位于美国加州。
SEMI S2 意味著什么?
SEMI 之下的安全工作小組制定了一套适用于半导体及平面显示器制造设备的环境、安全及健康的效能的标准,由此发展出 SEMI S2 国际安全指引的工业评估应用方式。符合 SEMI S2 不仅符合了国际相关规定,也是半导体产业的保险公司所要求的必要条件之一。
SEMI S2 以效能考量为主,涵盖半导体制造设备的环境、健康及安全条件。具体说來, SEMI S2 涉及电气、机械、防火、化学、辐射、噪音和防震等各方面的安全领域。
与其他 SEMI 指令,如 SEMI S8 (人体工学要求)和 SEMI S10 (风险评估)一起使用, SEMI S2 代表了半导体厂家的基本安全要求。
半导体业者为了降低机械危害的风险,采取非常多类别的防制与管理措施,其中最典型的措施是在采购设备系統时,將 SEMI S2
安规认证列为必备的规格要求。
易科在中国大陆,台湾同时开展SEMI测试服务,以丰富的经验帮助半导体厂商以最便捷的方式获得认可。
SEMI 标准
SEMI Standards
E6- Facilities Interface Specifications Guideline and Format
F5- Guide for Gaseous Effluent Handling
F14- Guide for the Design of Gas Source Equipment Enclosures
F15- Test Method for Enclosures Using Sulfur Hexafluoride Tracer Gas and Gas Chromatography
S1- Safety Guideline for Visual Hazard Alerts
S2- Safety Guidelines for Semiconductor Manufacturing Equipment
S3- Safety Guidelines for Heated Chemical Baths
S4- Safety Guideline for the Segregation/ Separation of Gas Cylinders Contained in Cabinets
S5- Safety Guideline for Flow Limiting Devices
S6- Safety Guideline for Ventilation
S7- Safety Guidelines for Environmental,Safety,and Health
Evaluation of Semiconductor
Manufacturing Equipment
S8- Safety Guidelines for Ergonomics/Human Factors Engineering of Semiconductor Manufacturing
Equipment
S9- Electrical Test Methods for Semiconductor Manufacturing Equipment
S10- Safety Guideline for Risk Assessment
S11- Environmental, Safety, and Health Guidelines for Semiconductor Manufacturing Equipment
Minienvironments
S12- Guidelines for Equipment Decontamination
S13- Safety Guidelines for Operation and Maintenance Manuals Used with Semiconductor
Manufacturing Equipment
S14- Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing
Equipment
S15- Safety Guidelines for the Evaluation of Toxic and Flammable Gas Detection Systems
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